Title:
薄膜トランジスタ及びその製造方法
Document Type and Number:
Japanese Patent JP3615239
Kind Code:
B2
More Like This:
Inventors:
Kameda Masaaki
Yasuki Harada
Yasuki Harada
Application Number:
JP11915294A
Publication Date:
February 02, 2005
Filing Date:
May 31, 1994
Export Citation:
Assignee:
Sanyo Electric Co., Ltd.
International Classes:
H01L29/78; H01L21/336; H01L29/786; (IPC1-7): H01L21/336; H01L29/786
Domestic Patent References:
| JP628516A | ||||
| JP521460A | ||||
| JP6302824A |
Attorney, Agent or Firm:
Masamasa Shibano