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Title:
空気浄化フィルタ及びその製造方法及び高度清浄装置
Document Type and Number:
Japanese Patent JP3977514
Kind Code:
B2
Abstract:
The present invention relates to an air filter having an inorganic material layer in which the following adsorbent is fixed on the surface of the supporter using powder of an inorganic substance as a binder. That is, the adsorbent is prepared by impregnating a salt of an inorganic acid to powder of an inorganic substance consisting of at least one of diatom earth, silica, alumina, a mixture of silica and alumina, aluminum silicate, activated alumina, porous glass, activated clay, activated bentonite, or synthetic zeolite. The air filter according to the present invention can adsorb and remove both of gaseous basic impurities and gaseous organic impurities, thus making a very effective filter for manufacturing semiconductor and LCD.

Inventors:
Soichiro Sakata
Katsumi Sato
Hideto Takahashi
Takao Okada
Application Number:
JP14385598A
Publication Date:
September 19, 2007
Filing Date:
May 26, 1998
Export Citation:
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Assignee:
Takasago Thermal Engineering Co., Ltd.
International Classes:
B01D53/34; B01J20/18; B01D39/00; B01D39/14; B01D46/52; B01D53/04; B01D53/81; B01J20/10; B01J20/28
Domestic Patent References:
JP4104835A
JP63310636A
JP9075736A
Attorney, Agent or Firm:
Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Kenji Wada