Title:
基板処理装置
Document Type and Number:
Japanese Patent JP4048192
Kind Code:
B2
Inventors:
Koji Sakai
Kawazu Tomoki
Hibiki Otani
Kawazu Tomoki
Hibiki Otani
Application Number:
JP2004233620A
Publication Date:
February 13, 2008
Filing Date:
August 10, 2004
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/31; H01L21/677; H01L21/027; H01L21/68
Domestic Patent References:
| JP9148239A | ||||
| JP2000114343A |
Attorney, Agent or Firm:
Junichi Omori