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Patent Searching and Data


Title:
CBD成膜装置
Document Type and Number:
Japanese Patent JP4080061
Kind Code:
B2
Inventors:
古賀 英範
二村 裕一
Application Number:
JP14054498A
Publication Date:
April 23, 2008
Filing Date:
May 07, 1998
Export Citation:
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Assignee:
本田技研工業株式会社
International Classes:
H01L21/368
Domestic Patent References:
JP7101715A
JP62213134A
JP58088198A
Attorney, Agent or Firm:
櫻井 俊彦