Title:
スライド弁
Document Type and Number:
Japanese Patent JP4095984
Kind Code:
B2
Abstract:
The slide valve for separating chambers (1, 2) at different pressures, e.g. under vacuum and under atmospheric pressure, in a coating plant is opened and closed by a sliding plate (7) which moves in a slot in a housing (6). This is suspended between seals (9, 11) and is operated by drives (8, 10) which are fixed in position in the housing. An independent claim is included for a coating plant fitted with the valve.
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Inventors:
アンドレアス・ザウアー
Application Number:
JP2004306377A
Publication Date:
June 04, 2008
Filing Date:
October 21, 2004
Export Citation:
Assignee:
Applied Materials GmbH & Co.KG
International Classes:
F16K3/02; F16K3/03; F16K3/00; F16K3/20; F16K3/314; F16K51/02
Domestic Patent References:
| JP2000512718A | ||||
| JP4068263U | ||||
| JP46033857B1 | ||||
| JP4097171U | ||||
| JP2004036762A | ||||
| JP8210522A | ||||
| JP58096166U | ||||
| JP7062537A | ||||
| JP2005133865A | ||||
| JP2005320622A |
Foreign References:
| US6302372 |
Attorney, Agent or Firm:
酒井 一
蔵合 正博
蔵合 正博