Title:
TCPハンドリング装置および当該装置における位置ずれ補正方法
Document Type and Number:
Japanese Patent JP4098306
Kind Code:
B2
Abstract:
A TCP handler (2) is provided with a pusher stage (4) capable of moving a carrier tape (5) adsorbed by an adsorption plate (34) in the X- and Y-axis directions and driving it for rotation around a vertical axis during operation of the TCP handler (2), and a probe card stage (7) capable of moving a probe card (8) in the X- and Y-axis directions and driving it for rotation around a vertical axis during operation of the TCP handler (2). With the TCP handler (2) having such arrangement, it is possible to achieve accurate positioning between the TCP and the probe card (8) to reduce the occurrence of poor contact.
Inventors:
Shuichi Kaneko
Kenji Higashiyama
Hiroyuki Kaneko
Murano Hisashi
Kenji Higashiyama
Hiroyuki Kaneko
Murano Hisashi
Application Number:
JP2004567555A
Publication Date:
June 11, 2008
Filing Date:
January 31, 2003
Export Citation:
Assignee:
Japan Engineering Co., Ltd.
Advantest Corporation
Advantest Corporation
International Classes:
G01R31/26; G01R31/01; G01R31/28
Domestic Patent References:
| JP1282831A | ||||
| JP2002181889A | ||||
| JP2002181888A | ||||
| JP10185996A | ||||
| JP7002982U | ||||
| JP7239366A |
Attorney, Agent or Firm:
Yuji Hayakawa
Suzuki Keiyasu
Suzuki Keiyasu