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Title:
オニウム塩及びその潜在的酸としての使用
Document Type and Number:
Japanese Patent JP4294317
Kind Code:
B2
Abstract:
A chemically amplified photoresist composition comprising, (a) a compound which cures upon the action of an acid or a compound whose solubility is increased upon the action of an acid; and (b) as photosensitive acid donor, at least one compound of the formula Ia, Ib, Ic, IIb or IIc wherein R1 is for example C1-C5alkyl, C3-C30cycloalkyl, C1-C5haloalkyl, C2-C12alkenyl, C4-C8cycloalkenyl, C6-C12bicycloalkenyl, phenyl, naphthyl, anthracyl, phenanthryl, or is a heteroaryl radical; all of which are unsubstituted or substituted; optionally some of the substituents form 5- or 6-membered rings with further substituents on the phenyl, naphthyl, anthracyl, phenanthryl, or heteroaryl ring or with one of the carbon atoms of the phenyl, naphtyl, anthracyl, phenanthryl, or heteroaryl ring; R'1 is for example C1-C12alkylene, C3-C30cycloalkylene, phenylene, naphtylene, diphenylene, or oxydiphenylene, wherein these radicals are unsubstituted or substituted; A and B for example are a direct bond; Ar1 and Ar2 independently of each other for example are phenyl, naphtyl, anthracyl, phenanthryl, or heteroaryl, all of which are unsubstituted or are substituted; Ar3, Ar4 and Ar5 for example have one of the meanings given for Ar1 and Ar2; Y is for example C3-C3-C30cycloalkylene, phenylene, naphthylene, diphenylene, or oxydiphenylene, all of which are unsubstituted or substituted.

Inventors:
山戸 斉
朝倉 敏景
松本 啓
大和 真樹
Application Number:
JP2002548218A
Publication Date:
July 08, 2009
Filing Date:
November 26, 2001
Export Citation:
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Assignee:
Ciba Holding Inc.
International Classes:
G03F7/004; C07C25/00; C07C25/18; C07C305/04; C07C305/06; C07C305/12; C07C305/18; C07C305/20; C07C305/22; C07C305/24; C07C381/12; C07D309/06; C07D317/54; C07D333/16; C07H9/04; C08G59/68; C08G65/10; G02B5/20; H01L21/027; C07B61/00; G03F7/039
Domestic Patent References:
JP11193322A
JP10226707A
JP10226658A
JP8062843A
JP7001831A
JP2002167340A
JP6199770A
JP8027094A
Attorney, Agent or Firm:
津国 肇
篠田 文雄