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Title:
熱処理ユニット
Document Type and Number:
Japanese Patent JP4313593
Kind Code:
B2
Inventors:
田中 秀樹
Application Number:
JP2003085328A
Publication Date:
August 12, 2009
Filing Date:
March 26, 2003
Export Citation:
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Assignee:
エスペック株式会社
International Classes:
B65G49/06; G02F1/13; B65G13/071; B65G47/90; F27B9/14; H01L21/677; H01L21/68
Domestic Patent References:
JP2002329661A
JP2002261142A
Attorney, Agent or Firm:
景山 憲二



 
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