Title:
搬送システム
Document Type and Number:
Japanese Patent JP4348520
Kind Code:
B2
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Inventors:
Kawaguchi Masatomi
Yoichi Honjo
Yoichi Honjo
Application Number:
JP2003322705A
Publication Date:
October 21, 2009
Filing Date:
September 16, 2003
Export Citation:
Assignee:
Murata Machinery Co., Ltd.
International Classes:
B65G1/00; B65G57/30; B65G49/06; B65G59/06; B65G60/00; H01L21/673; H01L21/677; H01L21/68
Domestic Patent References:
| JP1281220A | ||||
| JP11079388A | ||||
| JP2000264405A |
Attorney, Agent or Firm:
Akira Shioiri
Mika with salt
Mika with salt