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Patent Searching and Data


Title:
基板搬送装置
Document Type and Number:
Japanese Patent JP4349102
Kind Code:
B2
Inventors:
石橋 希遠
Application Number:
JP2003392707A
Publication Date:
October 21, 2009
Filing Date:
November 21, 2003
Export Citation:
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Assignee:
株式会社IHI
International Classes:
B65G13/04; B65G49/06; B65G39/00; H01L21/677; H01L21/68
Domestic Patent References:
JP2002289678A
JP3032738Y2
Attorney, Agent or Firm:
志賀 正武
渡邊 隆