Title:
試料作製方法および装置
Document Type and Number:
Japanese Patent JP4367433
Kind Code:
B2
Inventors:
Kaoru Umemura
Kazuo Takeda
Satoshi Tomimatsu
Kyoko Kiwa
Kazuo Takeda
Satoshi Tomimatsu
Kyoko Kiwa
Application Number:
JP2006120062A
Publication Date:
November 18, 2009
Filing Date:
April 25, 2006
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01N1/28; H01L21/66
Domestic Patent References:
| JP2306144A |
Foreign References:
| WO1999005506A1 |
Other References:
日立評論,1995年,77(11),801-804
Attorney, Agent or Firm:
Manabu Inoue