Title:
周期構造体の製造方法
Document Type and Number:
Japanese Patent JP4378352
Kind Code:
B2
Abstract:
A method for fabricating a periodic structure having a first layer constituted by a plurality of first columnar members arrayed at first intervals, and a second layer constituted by a plurality of second columnar members arrayed at second intervals in the direction different from the long-side direction of the first columnar members, wherein the first layer and the second layer are laminated to each other, the method including the steps of: preparing the first columnar members, wherein each first columnar member has a first convex part on a surface, and the length of the first convex part in the long-side direction of the first columnar member is longer than the width of the second columnar members; and laminating the first columnar members and the second columnar members via the first convex parts.
Inventors:
Tatsuro Uchida
Application Number:
JP2006032502A
Publication Date:
December 02, 2009
Filing Date:
February 09, 2006
Export Citation:
Assignee:
Canon Inc
International Classes:
G02B1/02; G02B6/12
Domestic Patent References:
| JP2001209189A | ||||
| JP2004004419A | ||||
| JP2001194501A | ||||
| JP2003185832A |
Foreign References:
| US6358854 |
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio
Yuichi Uchio