Title:
液体供給装置、基板処理装置および液体供給方法
Document Type and Number:
Japanese Patent JP4437744
Kind Code:
B2
Abstract:
A liquid supply apparatus comprises a pump mechanism for pumping out a liquid to a conduit, a flowmeter for measuring a flowrate of the liquid flowing through the conduit, and a controller for controlling these mechanisms. The pump mechanism comprises a flexible chamber made of resin, a pressure chamber housing the flexible chamber, and an electro-pneumatic regulator for adjusting pressure in a space between the pressure chamber and the flexible chamber. The flexible chamber comprises a bellows. In the liquid supply apparatus, while pressure is applied to the flexible chamber of the pump mechanism and the liquid in the flexible chamber is pumped out to the conduit, the pressure applied to the flexible chamber is controlled by the controller on the basis of a flowrate of the liquid measured by the flowmeter. This makes it possible to supply the liquid of a small flowrate while controlling the flowrate accurately.
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Inventors:
Hiroshi Mizohata
Application Number:
JP2004375294A
Publication Date:
March 24, 2010
Filing Date:
December 27, 2004
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G05D7/06; G01F1/48; H01L21/306
Domestic Patent References:
| JP2001127034A | ||||
| JP2000194423A | ||||
| JP2001257190A | ||||
| JP2118552U | ||||
| JP10002770A | ||||
| JP11067711A | ||||
| JP2000002187A |
Attorney, Agent or Firm:
Masahiro Matsusaka