Title:
紫外線による硬化方法及び装置
Document Type and Number:
Japanese Patent JP4446558
Kind Code:
B2
Inventors:
Kazuhiro Umeki
Katsuhiko Fujiwara
Katsuhiko Fujiwara
Application Number:
JP2000138103A
Publication Date:
April 07, 2010
Filing Date:
May 11, 2000
Export Citation:
Assignee:
Ricoh Optical Co., Ltd.
International Classes:
C08J3/28; G03F7/20; C03C15/00; G02B3/00; G02B3/08; G03F7/40; H01L21/30
Domestic Patent References:
| JP2798792B2 | ||||
| JP5267154A |
Attorney, Agent or Firm:
Shigeo Noguchi