Title:
マイクロミラー駆動装置及びそのオフセット電圧調整方法
Document Type and Number:
Japanese Patent JP4520074
Kind Code:
B2
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Inventors:
Yukio Hirai
Application Number:
JP2001169672A
Publication Date:
August 04, 2010
Filing Date:
June 05, 2001
Export Citation:
Assignee:
富士通株式会社
International Classes:
G02B26/08
Domestic Patent References:
| JP4211218A | ||||
| JP7294832A | ||||
| JP2001013443A | ||||
| JP4230724A | ||||
| JP2001010112A |
Attorney, Agent or Firm:
Shintaro Nogawa