Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
熱処理装置用ヒータの結線方法及び熱処理装置
Document Type and Number:
Japanese Patent JP4618920
Kind Code:
B2
Inventors:
Takanori Saito
Nagauchi Choei
Go Takizawa
Ikeman Karuki
Application Number:
JP2001096481A
Publication Date:
January 26, 2011
Filing Date:
March 29, 2001
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
INTEL CORPORATION
International Classes:
H01L21/205; H05B3/00; F27B5/14; F27D11/02; H01L21/31
Domestic Patent References:
JP59177890A
JP4503736A
JP4255214A
JP4179223A
JP2000021890A
JP11102915A
JP62170481A
JP2001007035A
Attorney, Agent or Firm:
Kimura Mitsuru