Title:
基板処理装置
Document Type and Number:
Japanese Patent JP4708044
Kind Code:
B2
Abstract:
LEDs in an LED display part are arranged so as to have approximately the same placing form as containers. When a chemical solution in a container is exhausted, a corresponding LED of the LED display part lights up. Prior to an operation of replacing the container, an operator allows a bar code reader to read a bar code of an unused container. A bar code reader collator collates the bar code data of the unused container with the bar code data of a container corresponding to the lighting LED, which is already registered in a data base. When the bar code reader collator judges that the chemical solutions in the both containers are identical, the display of the LED is changed from a lighting-up display to a flashing display. This makes it easy to recognize the disposing position of the empty container to be replaced, thereby effectively preventing incorrect replacement of the container.
More Like This:
| JP3471309 | ADHESIVE COATING APPARATUS |
| JP2002126604 | DEVICE FOR PROCESSING OF SUBSTRATE |
Inventors:
Kazuhiro Nishimura
Masaka Shiga
Masaka Shiga
Application Number:
JP2005034098A
Publication Date:
June 22, 2011
Filing Date:
February 10, 2005
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B05C11/10; B05C11/08; B08B3/00; H01L21/027
Domestic Patent References:
| JP11319686A | ||||
| JP20017004A | ||||
| JP5160016A | ||||
| JP6457793A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita