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Patent Searching and Data


Title:
スピンコート製膜法
Document Type and Number:
Japanese Patent JP4758659
Kind Code:
B2
Inventors:
Yuhiro Saito
Masashi Hakada
Application Number:
JP2005052417A
Publication Date:
August 31, 2011
Filing Date:
February 28, 2005
Export Citation:
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Assignee:
FUJIFILM Corporation
International Classes:
B05D1/40; B05D3/04; B05D7/00; G01N21/27; G01N33/543; B32B15/08
Domestic Patent References:
JP2004271514A
JP2004286538A
JP6156414A
JP2003311201A
Attorney, Agent or Firm:
Patent Service Corporation Patent Office Sykes