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Title:
細長いナノ構造及び関連素子
Document Type and Number:
Japanese Patent JP4773364
Kind Code:
B2
Abstract:
In a method of making an elongated carbide nanostructure, a plurality of spatially-separated catalyst particles is applied to a substrate. The spatially-separated catalyst particles and at least a portion of the substrate are exposed to a metal-containing vapor at a preselected temperature and for a period sufficient to cause an inorganic nano-structure to form between the substrate and at least one of the catalyst particles. The inorganic nano-structure is exposed to a carbon-containing vapor source at a preselected temperature and for a period sufficient to carburize the inorganic nano-structure.

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Inventors:
Zacaracas, Locus
Lee, Ji Eun
Huber, William Haringer
Coderman, Reed Loader
Mani, Vanita
Application Number:
JP2006541308A
Publication Date:
September 14, 2011
Filing Date:
November 16, 2004
Export Citation:
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Assignee:
GENERAL ELECTRIC COMPANY
International Classes:
C01B31/30; B82B1/00; B82B3/00; C23C16/02; C23C16/04; C30B11/00; C30B11/12; C30B29/36; C30B29/60; C30B29/62; H01J1/304; H01J9/02; B01J23/52; B01J23/75; B01J23/755; B01J27/22; B01J37/02; B01J37/08
Domestic Patent References:
JP2006508888A
JP5078977A
JP2002534351A
Attorney, Agent or Firm:
Arakawa Satoshi
Hiroshi Ogura
Toshihisa Kurokawa