Title:
スピン処理装置およびスピン処理方法
Document Type and Number:
Japanese Patent JP4801853
Kind Code:
B2
Inventors:
Tsutomu Kikuchi
Application Number:
JP2001232076A
Publication Date:
October 26, 2011
Filing Date:
July 31, 2001
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B08B3/02; H01L21/304; B08B3/10
Domestic Patent References:
| JP63185029A | ||||
| JP2001044159A |
Attorney, Agent or Firm:
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai