Title:
センサチップ及びその製造方法
Document Type and Number:
Japanese Patent JP4807493
Kind Code:
B2
Inventors:
Nakamura Hideaki
Masao Goto
Kurusu Fumiyo
Tomoko Ishikawa
Isao Karube
Toshifumi Hosoya
Shingo Kaimori
Ichino Moroho
Masao Goto
Kurusu Fumiyo
Tomoko Ishikawa
Isao Karube
Toshifumi Hosoya
Shingo Kaimori
Ichino Moroho
Application Number:
JP2005293363A
Publication Date:
November 02, 2011
Filing Date:
October 06, 2005
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
National Institute of Advanced Industrial Science and Technology
National Institute of Advanced Industrial Science and Technology
International Classes:
G01N27/327; G01N27/416
Domestic Patent References:
| JP2004506178A | ||||
| JP2003513279A | ||||
| JP4264246A | ||||
| JP6109693A | ||||
| JP2006010358A | ||||
| JP9159642A | ||||
| JP2000065777A |
Foreign References:
| WO2005026178A1 | ||||
| WO2005124329A1 | ||||
| US5695947 |
Attorney, Agent or Firm:
Tetsuji Kamidai
Naomi Kamino
Naomi Kamino