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Title:
基板処理装置
Document Type and Number:
Japanese Patent JP4824590
Kind Code:
B2
Inventors:
Daisuke Hayashi
High Morihiro Pear
Application Number:
JP2007021017A
Publication Date:
November 30, 2011
Filing Date:
January 31, 2007
Export Citation:
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Assignee:
INTEL CORPORATION
International Classes:
H01L21/683; C23C16/44; H01L21/205; H01L21/3065
Domestic Patent References:
JP2003293138A
JP8124999A
JP2001284258A
JP2004349516A
JP6349750A
JP2007242954A
Attorney, Agent or Firm:
Another role
Satoshi Muramatsu



 
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