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Title:
電子顕微鏡
Document Type and Number:
Japanese Patent JP4842875
Kind Code:
B2
Abstract:

To provide an electron microscope capable of always positioning a sample in a visual field of a camera, and of preventing the number of installation of various types of apparatuses in a sample chamber from being restricted by the camera.

This electron microscope is composed by supporting the camera 4 to a sample holding means 9 of a sample fine-movement device 3. Since the camera 4 is moved in conjunction with the movement of a sample 8 by composing the electron microscope like that, the sample 8 is prevented from deviating from the visual field of the camera 4 or being interrupted by various types of apparatuses 6 installed around it. The number of installation of the various types of apparatuses 6 that has been restricted can be increased by installing the camera 4 on a wall of the sample chamber 1.

COPYRIGHT: (C)2009,JPO&INPIT


Inventors:
Kazuya Asano
Ryuichi Tanaka
Application Number:
JP2007092932A
Publication Date:
December 21, 2011
Filing Date:
March 30, 2007
Export Citation:
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Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/20; H01J37/28
Domestic Patent References:
JP2006040768A
JP9259805A
JP2004138590A
JP2006173020A
JP2006114348A
JP2006153894A
JP2006173021A
JP2004199884A
JP59066852U
Attorney, Agent or Firm:
Polaire Patent Business Corporation