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Patent Searching and Data


Title:
筒状部材およびこれを用いたシリコン析出用装置
Document Type and Number:
Japanese Patent JP4845753
Kind Code:
B2
Inventors:
大久保 直幸
Application Number:
JP2007017767A
Publication Date:
December 28, 2011
Filing Date:
January 29, 2007
Export Citation:
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Assignee:
京セラ株式会社
International Classes:
C01B33/027; C04B35/599; F27D11/12
Domestic Patent References:
JP2003002626A
JP2005187259A
JP61215212A
Foreign References:
WO2002100777A1