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Patent Searching and Data


Title:
カンチレバーの作製方法
Document Type and Number:
Japanese Patent JP4902073
Kind Code:
B2
Inventors:
Hiroshi Muramatsu
Jun Shinohara
Application Number:
JP2001270279A
Publication Date:
March 21, 2012
Filing Date:
September 06, 2001
Export Citation:
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Assignee:
Seiko Instruments Inc.
International Classes:
B81C99/00; G01B7/00; B29C67/00; B81B3/00; G01Q20/00; G01Q60/22; G01Q60/38; G01Q70/16
Domestic Patent References:
JP9177709A
JP2000235038A
JP2000146807A
JP11213434A
JP6317404A
Other References:
Tarou Takagi, Naomasa Nakajima,ARCHITECTURE COMBINATIONBY MICRO PHOTOFORMING PROCESS,IEEE Workshop on Micro Electro Mechanical Systems, 1994,1994年 1月28日,pp. 211-216
Shoji Maruo, Koji Ikuta and Korogi Hayato,LIGHT-DRIVEN MEMS MADE BY HIGH-SPEED TWO-PHOTON MICROSTEREOLITHOGRAPHY,The 14th IEEE International Conference on Micro Electro Mechanical Systems,2001年 1月25日,pp. 594-597
Attorney, Agent or Firm:
Kentaro Kuhara
Noriaki Uchino
Nobuyuki Kimura