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Patent Searching and Data


Title:
気相成長装置及び気相成長方法
Document Type and Number:
Japanese Patent JP5004513
Kind Code:
B2
Inventors:
Hideki Ogasawara
Kawashima Tadashi
Application Number:
JP2006161409A
Publication Date:
August 22, 2012
Filing Date:
June 09, 2006
Export Citation:
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Assignee:
sumco tech xiv Co., Ltd.
International Classes:
C30B29/06; C23C16/24; C23C16/455; H01L21/205
Domestic Patent References:
JP2000012470A
JP2003203867A
JP2003277936A
JP5160071A
JP2000058456A
JP6302519A
JP2003197532A
JP2000150399A
Attorney, Agent or Firm:
Toshihiko Aikawa