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Title:
欠陥検査装置及び欠陥検査方法
Document Type and Number:
Japanese Patent JP5006551
Kind Code:
B2
Inventors:
Osamu Hirose
Application Number:
JP2006036789A
Publication Date:
August 22, 2012
Filing Date:
February 14, 2006
Export Citation:
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Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G01N21/892
Domestic Patent References:
JP2001337042A
JP62138740A
JP8094333A
JP2005257681A
JP2005024431A
Attorney, Agent or Firm:
Akira Koike
Seiji Iga
Toshiya Fujii
Nobuhiro Noguchi
Yusei Atsuya



 
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