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Title:
MEMSマイクロモータおよびこのマイクロモータを装備する時計
Document Type and Number:
Japanese Patent JP5053046
Kind Code:
B2
Abstract:
The micromotor (36) has a cylindrical central shaft (64) e.g. plunging metallic axle, connected on a silicon on insulator type plate (30) which is made of crystalline or amorphous material e.g. silicon. The shaft is staged and extended across a hole (74) of the plate. The shaft is locked and centered in the hole using elastic fixation structures (96) which are formed by engraving in a substrate (32) and which are arranged on the circumference of the hole. The shaft has an external axial wall that is provided with a covering. The plate has an upper layer in which a rotor (42) is engraved.

Inventors:
リオネル・パラテ
ウィルフリート・ノエル
ジャン-ピエール・レボー
ニコラス・ゴレイ
イヴ・ペトレマンド
アンドレ・ザネッタ
ファビアン・ブロンド
ピエル-アンドレ・マイスター
Application Number:
JP2007294753A
Publication Date:
October 17, 2012
Filing Date:
November 13, 2007
Export Citation:
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Assignee:
ウーテーアー・エス・アー・マニファクチュール・オロロジェール・スイス
International Classes:
H02N1/00; B81B5/00
Domestic Patent References:
JP7241088A
JP7177761A
JP2151279A
JP64008880A
JP2008122390A
JP2002233171A
JP2004072993A
JP57130595U
Attorney, Agent or Firm:
山川 政樹
山川 茂樹