Title:
反射防止膜の成膜方法及び反射防止膜
Document Type and Number:
Japanese Patent JP5123785
Kind Code:
B2
Inventors:
Akihisa Takahashi
Akatsuki Ishibashi
Akatsuki Ishibashi
Application Number:
JP2008209208A
Publication Date:
January 23, 2013
Filing Date:
August 15, 2008
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/08; G02B1/11; G02B1/116
Domestic Patent References:
| JP60111253A | ||||
| JP2007023304A | ||||
| JP2009176927A | ||||
| JP10056192A |
Other References:
KANG,S.J. et al,Piezoelectric and optical properties of ZnO thin films deposited using various O2/(Ar+O2) gas ratios ,Journal of Materials Science. Materials in Electronics,2007年 6月,Vol.18,p.647-653
Attorney, Agent or Firm:
Masatake Shiga
Shingo Suzuki
Shingo Suzuki