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Title:
誘導加熱を用いた熱処理方法および熱処理装置
Document Type and Number:
Japanese Patent JP5226206
Kind Code:
B2
Inventors:
内田 直喜
尾崎 一博
Application Number:
JP2006345722A
Publication Date:
July 03, 2013
Filing Date:
December 22, 2006
Export Citation:
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Assignee:
三井造船株式会社
International Classes:
H01L21/324; F27B5/14; F27B5/18; F27D7/06; F27D11/06; H01L21/26; H05B6/06; H05B6/10; H05B6/40; H05B6/44
Domestic Patent References:
JP2006120693A
JP2003133319A
JP2004289012A
JP2006278150A
JP2003306772A
JP2005203743A
JP2004260097A
JP2005072468A
Attorney, Agent or Firm:
村上 友一
大久保 操



 
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