ルテニウム含有膜を堆積するための方法

Japanese Patent JP5265570

B2

Organometallic compound of the formula (I): €ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒL - Ru - X€ƒ€ƒ€ƒ€ƒ€ƒ(I) wherein: L is a non-aromatic cyclic unsaturated hydrocarbon ligand (L), having at least six cyclic carbon atoms, said cycle being unsubstituted or substituted, and X is either a non aromatic cyclic unsaturated hydrocarbon ligand identical or different from (L), having at least six cyclic carbon atoms said cycle being unsubstituted or substituted or a cyclic or acyclic conjugated alkadienyl hydrocarbon ligand having from five to ten carbons atoms, said hydrocarbon ligand being unsubstituted or substituted Use as a ruthenium precursor to manufacture ruthenium based film coated metal electrodes.

JPH0628245	INDUSTRIAL APPLICABILITY: Organic metal vapor deposition apparatus
WO/2022/025332	COBALT COMPOUND, PRECURSOR COMPOSITION INCLUDING SAME, AND METHOD FOR PREPARING THIN FILM USING SAME
JP2010056393	METHOD OF EXTRACTING AND CLEANING METAL WIRE FILM, METAL WIRE SUBJECTED TO EXTRACTING/CLEANING PROCESS, AND DEVICE HAVING SAME

Gatineau, Julian
Dusara, Christian

JP2009542378A

August 14, 2013

December 20, 2007

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Rail Liquide-Societe Anonym Pools Retude e Rex Prosatation de Procede Georges Claude

C23C16/18; C07F15/00; C23C16/40; H01L21/28; H01L21/285

JP2003533535A
JP2005060814A
JP2004292332A
JP2003342286A
JP9235287A

WO2005103318A1

Inorganica Chimica Acta,2006年10月,359(13),p.4393-4397
Inorganica Chimica Acta,2004年,357(11),p.3181-3186
Journal of Organometallic Chemistry,1975年,97(2),p.275-282

Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Katsu Sunagawa

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