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Patent Searching and Data


Title:
シリコン基板への貫通電極の製造方法
Document Type and Number:
Japanese Patent JP5304013
Kind Code:
B2
Inventors:
Hiroki Watanabe
Yu Emori
Komazu Motoyasu
Application Number:
JP2008118329A
Publication Date:
October 02, 2013
Filing Date:
April 30, 2008
Export Citation:
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Assignee:
Toppan Printing Co., Ltd.
International Classes:
H01L23/522; H01L21/02; H01L21/3205; H01L21/683; H01L21/768
Domestic Patent References:
JP9085684A
JP11034177A
JP11128367A
JP2006287085A
JP2003282815A
JP2005235498A
JP2005219231A