To provide a three dimensional form sensor capable of obtaining three dimensional form information at a high speed and with precision using a CMOS image sensor.
The three dimensional form sensor includes a lens 1 whose focal distance is variable, a CMOS image sensor 2 for photographing an object to be measured through the lens, a signal processing part 3 which reads the image photographed with the CMOS image sensor for each single frame to perform a predetermined process, a lens control part 6 which changes the focal distance of the lens stepwise for each single frame and holds the focal distance at a constant value during a single frame period, and a distance calculation part 4 which obtains a distance from a photographing point to an object to be measured, based on the image having been processed by the signal processing part and the focal distance information of the lens.
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Shunichi Takahashi