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Title:
測定装置及び成膜装置
Document Type and Number:
Japanese Patent JP5367196
Kind Code:
B1
Inventors:
佐井 旭陽
日向 陽平
大瀧 芳幸
姜 友松
Application Number:
JP2013519298A
Publication Date:
December 11, 2013
Filing Date:
September 10, 2012
Export Citation:
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Assignee:
株式会社シンクロン
International Classes:
G01N21/84; C23C14/24; C23C16/52; G01B11/06; G01N21/27
Domestic Patent References:
JPH01304345A1989-12-07
JPH0587733A1993-04-06
JP2007309800A2007-11-29
JP2002277215A2002-09-25
JP2006071589A2006-03-16
JP2000186916A2000-07-04
JPH0590371A1993-04-09
JP2005055407A2005-03-03
JP2001174404A2001-06-29
JP2008180597A2008-08-07
JP2012026949A2012-02-09
JPH01304345A1989-12-07
JPH0587733A1993-04-06
JP2007309800A2007-11-29
Foreign References:
WO2012046474A12012-04-12
WO2011001968A12011-01-06
WO2012046474A12012-04-12
Attorney, Agent or Firm:
秋山 敦
城田 百合子



 
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