Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
半導体の電気伝導特性の非接触測定方法
Document Type and Number:
Japanese Patent JP5500621
Kind Code:
B2
Inventors:
孫 勇
Application Number:
JP2009134286A
Publication Date:
May 21, 2014
Filing Date:
June 03, 2009
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
国立大学法人九州工業大学
International Classes:
G01R27/02
Domestic Patent References:
JP55059347U
JP2003139746A
JP6273477A
JP2006064537A
Foreign References:
WO2009069660A1
Attorney, Agent or Firm:
中前 富士男
来田 義弘



 
Previous Patent: 除染装置及び除染方法

Next Patent: JPH05500622