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Title:
広帯域顕微鏡法に使用するための浸液を用いる反射屈折顕微鏡対物レンズ
Document Type and Number:
Japanese Patent JP5529729
Kind Code:
B2
Inventors:
アームストロング・ジョセフ・ジェイ.
Application Number:
JP2010512205A
Publication Date:
June 25, 2014
Filing Date:
June 12, 2008
Export Citation:
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Assignee:
KLA-TENCOR CORPORATION
International Classes:
G02B17/08
Domestic Patent References:
JP2007514179A
JP6273674A
Foreign References:
WO2005094304A1
WO2006069725A1
Attorney, Agent or Firm:
特許業務法人明成国際特許事務所