Title:
コンタクトプローブ
Document Type and Number:
Japanese Patent JP5643477
Kind Code:
B2
Inventors:
木村 哲平
町田 一道
町田 一道
Application Number:
JP2008158631A
Publication Date:
December 17, 2014
Filing Date:
June 18, 2008
Export Citation:
Assignee:
日本電子材料株式会社
International Classes:
G01R1/067; G01R31/26; H01L21/66
Attorney, Agent or Firm:
Satoshi Otsuki