Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
プラズマ評価方法、プラズマ処理方法及びプラズマ処理装置
Document Type and Number:
Japanese Patent JP5663658
Kind Code:
B2
Inventors:
辛川 孝行
上田 博一
Application Number:
JP2013511021A
Publication Date:
February 04, 2015
Filing Date:
April 18, 2012
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/318; C23C16/34; C23C16/52; H01L21/31
Domestic Patent References:
JPS63289924A1988-11-28
JPH02148715A1990-06-07
JPH09306869A1997-11-28
JP2010186885A2010-08-26
JP2001284322A2001-10-12
JP2006045640A2006-02-16
JPS63289924A1988-11-28
JPH02148715A1990-06-07
JPH09306869A1997-11-28
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Junji Kashioka
戸津 Yosuke