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Patent Searching and Data


Title:
基板の搬送装置
Document Type and Number:
Japanese Patent JP5744451
Kind Code:
B2
Inventors:
佐藤 英雄
Application Number:
JP2010209789A
Publication Date:
July 08, 2015
Filing Date:
September 17, 2010
Export Citation:
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Assignee:
株式会社フジ機工
International Classes:
H01L21/677; B65G13/00; B65G39/04
Domestic Patent References:
JP2005272061A
JP2144312A
Attorney, Agent or Firm:
窪田 卓美