Title:
光フィルター及びそれを備えた光モジュール
Document Type and Number:
Japanese Patent JP5798709
Kind Code:
B2
Abstract:
An optical filter includes first and second substrates, first and second mirrors, and first and second electrodes. The first substrate has a flat surface. The second substrate includes a first surface, a second surface and a third surface, the second surface surrounding the first surface in a plan view, the third surface surrounding the second surface in a plan view, a height of the first surface above the second surface being lower than a height of the third surface above the second surface, the first surface and the second surface facing the flat surface of the first substrate. The first mirror is disposed on the flat surface of the first substrate. The second mirror is disposed on the first surface of the second substrate, the second mirror facing the first mirror. The first electrode is disposed on the flat surface of the first substrate. The second electrode is disposed on the second surface of the second substrate, the second electrode facing the first electrode.
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Inventors:
Hiroshi Funasaka
Application Number:
JP2009050791A
Publication Date:
October 21, 2015
Filing Date:
March 04, 2009
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G02B26/00
Domestic Patent References:
| JP2002232049A | ||||
| JP2000162516A | ||||
| JP200691854A | ||||
| JP2006178320A | ||||
| JP200357438A |
Attorney, Agent or Firm:
Masatake Shiga
Yoshifumi Saeki
Kazunori Onami
Yoshifumi Saeki
Kazunori Onami