Title:
機械振動子およびその製造方法
Document Type and Number:
Japanese Patent JP5848210
Kind Code:
B2
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Inventors:
Koji Ono
Koji Yamaguchi
Manabu Mitsuhara
Koji Yamaguchi
Manabu Mitsuhara
Application Number:
JP2012180384A
Publication Date:
January 27, 2016
Filing Date:
August 16, 2012
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
H03H9/24; H01L29/84; H03H3/007
Domestic Patent References:
| JP2009231858A | ||||
| JP2000196138A | ||||
| JP2006032780A | ||||
| JP2008288293A | ||||
| JP2000004068A | ||||
| JP2006506236A | ||||
| JP2009220252A | ||||
| JP5037287A |
Foreign References:
| WO2009041362A1 |
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Yuzo Koike
Shigeki Yamakawa
Yuzo Koike