Title:
インクノズルおよびそれを備えたインクジェットプリンタヘッド
Document Type and Number:
Japanese Patent JP6427157
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a silicon device having a structure which suppresses or prevents metal atoms in a ferroelectric layer from diffusing in a silicon layer and achieves downsizing and improvement of characteristics.SOLUTION: An ink jet printer head 1 being a silicon device includes: a silicon substrate 2; a silicon oxide layer 5B formed on the silicon substrate 2; a diffusion prevention film 70 formed on the silicon oxide layer 5B; and a piezoelectric element 6 provided on the diffusion prevention film 70. A compression chamber 62 serving as an ink accumulation part is formed on the silicon substrate 2, and a thin silicon layer 5A and the silicon oxide layer 5B, located on a top plate part of the compression chamber, form a vibration film 5. The piezoelectric element 6 includes: a lower electrode 7 contacting with the diffusion prevention film 70; a piezoelectric layer 8 provided on the lower electrode 7; and an upper electrode 9 provided on the piezoelectric layer 8. The diffusion prevention film 70 prevents diffusion of metal atoms in the piezoelectric layer 8.SELECTED DRAWING: Figure 1
Inventors:
Takaya Nagahata
Yo Sawamura
Yo Sawamura
Application Number:
JP2016216422A
Publication Date:
November 21, 2018
Filing Date:
November 04, 2016
Export Citation:
Assignee:
ROHM Co., Ltd.
International Classes:
H01L41/047; B41J2/14; H01L21/822; H01L21/8234; H01L27/04; H01L27/06; H01L27/088; H01L41/09; H01L41/113
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Attorney, Agent or Firm:
Patent Business Corporation Ai Patent Office