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Title:
下地剤及び相分離構造を含む構造体の製造方法
Document Type and Number:
Japanese Patent JP6530907
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of a structural body containing a substrate agent which improves a phase separation performance of a block copolymer and can be conveniently used and a phase separation structure.SOLUTION: A substrate agent 2 for performing phase separation of a layer containing a block copolymer formed by combining a hydrophobic polymer block (b11) and a hydrophilic polymer block (b21) on a substrate 1 contains a resin component. Therein, the resin component has a constitutional unit of a hydrophobic polymer block (b12) or a hydrophilic polymer block (b22) and at least one terminal part of a main chain has at least two hydroxide groups. In the substrate agent 2, the constitutional unit of the hydrophobic polymer block (b12) contains a constitutional unit (u1) including substituent/unsubstituted styrene aggregate and the constitutional unit of the hydrophilic polymer block (b22) contains a constitutional unit (u2) of an acrylic ester in which H bonded to carbon atom at α-position is substituted/unsubstituted.SELECTED DRAWING: Figure 1

Inventors:
矢萩 真人
川上 晃也
前橋 貴哉
鈴木 一生
松宮 祐
黒澤 剛志
山野 仁詩
Application Number:
JP2014247174A
Publication Date:
June 12, 2019
Filing Date:
December 05, 2014
Export Citation:
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Assignee:
東京応化工業株式会社
International Classes:
C09D125/04; B05D1/38; B05D3/02; B05D7/24; C09D201/02; H01L21/027
Domestic Patent References:
JP2013216859A
JP2014185311A
JP2014185318A
JP2013534542A
JP2012062365A
Attorney, Agent or Firm:
棚井 澄雄
志賀 正武
松本 将尚
宮本 龍
飯田 雅人