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Title:
露光装置、フラットパネルディスプレイの製造方法、デバイス製造方法、及び露光方法
Document Type and Number:
Japanese Patent JP6537024
Kind Code:
B2
Abstract:
In a substrate stage, when a Y coarse movement stage moves in the Y-axis direction, an X coarse movement stage, a weight cancellation device, and an X guide move integrally in the Y-axis direction with the Y coarse movement stage, and when the X coarse movement stage moves in the X-axis direction on the Y coarse movement stage, the weight cancellation device move on the X guide in the X-axis direction integrally with the X coarse movement stage. Because the X guide is provided extending in the X-axis direction while covering the movement range of the weight cancellation device in the X-axis direction, the weight cancellation device is constantly supported by the X guide, regardless of its position. Accordingly, a substrate can be guided along the XY plane with good accuracy.

Inventors:
Yasuo Aoki
Application Number:
JP2016174696A
Publication Date:
July 03, 2019
Filing Date:
September 07, 2016
Export Citation:
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Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; H01L21/683
Domestic Patent References:
JP2004363259A
JP2011249555A
JP2010206205A
JP2001023894A
JP2006086442A
JP2006253572A
Foreign References:
WO2000014779A1
WO2008129762A1
Attorney, Agent or Firm:
Atsushi Tateishi