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Patent Searching and Data


Title:
可撓性のあるワークピースのためのサポート
Document Type and Number:
Japanese Patent JP6600706
Kind Code:
B2
Abstract:
Clamping of edges of flexible workpieces to a support surface is improved by creating a region of reduced pressure proximate the edges, by shaping air conduits so that they narrow in the edge regions.

Inventors:
Neil short
Paddy Ash
Application Number:
JP2018029458A
Publication Date:
October 30, 2019
Filing Date:
February 22, 2018
Export Citation:
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Assignee:
ASM Assembly Systems Singapore PTE Limited
International Classes:
H01L21/683; B23Q3/08
Domestic Patent References:
JP2012176852A
JP61061131U
JP5084682A
Foreign References:
US3413903
Attorney, Agent or Firm:
Yasuhiko Murayama
Shinya Mitsuhiro
Tatsuhiko Abe