Title:
石英ガラスルツボ
Document Type and Number:
Japanese Patent JP6681269
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a quartz glass crucible in which roughness or exfoliation of a crucible inner surface is suppressed by suppressing dispersion of crystallization of an inner layer, by adjusting Zr concentration in the inner layer of the quartz glass crucible within a specific range.SOLUTION: There is provided a quartz glass crucible 1 for pulling up a single crystal having a layer structure including at least an outer layer 1a comprising an opaque layer and formed on the outermost side, and an inner layer 1b comprising a transparent layer and formed on the innermost side. In the quartz glass crucible 1, Zr concentration in the inner layer 1b is 700 wt ppb or more and 1,700 wt ppb or less.SELECTED DRAWING: Figure 1
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Inventors:
Ayahei Saito
Application Number:
JP2016100409A
Publication Date:
April 15, 2020
Filing Date:
May 19, 2016
Export Citation:
Assignee:
CoorsTek Co., Ltd.
International Classes:
C30B29/06; C03B20/00; C30B15/10
Domestic Patent References:
| JP2006021985A | ||||
| JP2004521851A | ||||
| JP2007513857A | ||||
| JP63310748A | ||||
| JP9255346A | ||||
| JP47001477B1 | ||||
| JP2005231986A | ||||
| JP2009132616A |
Attorney, Agent or Firm:
Kinoshita Shigeru
Yuko Sawada
Yuko Sawada