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Patent Searching and Data


Title:
加工システム
Document Type and Number:
Japanese Patent JP6695102
Kind Code:
B2
Abstract:
A processing system includes a processing apparatus having functional units including a holding unit that holds a workpiece by a holding surface, a processing unit that processes the workpiece held by the holding unit, and a feed unit that moves the holding unit and the processing unit relatively. The processing system further includes a detecting unit that is provided for part or all of the functional units and detects any of vibration, current, voltage, load, speed, torque, pressure, temperature, flow rate, change in a taken image, and the thickness of the workpiece, and a data accumulating unit that accumulates information included in a signal output from the detecting unit as data.

Inventors:
Takekawa Masahiro
Mori Tatsuhiko
Hiroki Ochiai
Frank Lily Way
Application Number:
JP2015106801A
Publication Date:
May 20, 2020
Filing Date:
May 26, 2015
Export Citation:
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Assignee:
Disco Co., Ltd.
International Classes:
H01L21/02; B23Q17/00; B23Q17/09; B23Q17/20; B24B49/08; B24B49/10; B24B49/12; B24B49/14; B24B49/16; H01L21/301
Domestic Patent References:
JP2012254499A
JP5285788A
Attorney, Agent or Firm:
Matsumoto
Tomohiro Okamoto