Title:
加工方法
Document Type and Number:
Japanese Patent JP6949421
Kind Code:
B2
Abstract:
A method of processing a workpiece with a cutting blade, the workpiece having a body of metal disposed in superposed relation to projected dicing lines, including: a first metal burr removing step of moving the cutting blade through first cut grooves while the cutting blade is positioned at such a height that a lowermost end of the cutting blade is lower than an upper end of the body of metal; and a second metal burr removing step of moving the cutting blade through the second cut grooves while the cutting blade is positioned at such a height that the lowermost end of the cutting blade is lower than the upper end of the body of metal. A liquid containing an organic acid and an oxidizing agent is supplied to the workpiece in the first metal burr removing step and the second metal burr removing step.
Inventors:
Kenji Takenouchi
Application Number:
JP2017092985A
Publication Date:
October 13, 2021
Filing Date:
May 09, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06
Domestic Patent References:
| JP2001077055A | ||||
| JP2015177089A | ||||
| JP2014007229A | ||||
| JP2006041261A | ||||
| JP2008130929A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro