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Patent Searching and Data


Title:
予備サーベイを用いる改善された分析
Document Type and Number:
Japanese Patent JP7091256
Kind Code:
B2
Abstract:
A method and apparatus for analysis of a specimen in a microscope are provided. A first survey is performed that collects analytical data from a region of interest on the specimen surface using a first set of conditions. A second survey is performed that collects additional analytical data from selected parts of the region of interest on the specimen surface using a second set of conditions, different from the first set of conditions. The analytical data from the first survey is used to select the parts used for data collection in the second survey and to decide the order in which they are used.

Inventors:
Lang Christian
Colin James
Application Number:
JP2018559379A
Publication Date:
June 27, 2022
Filing Date:
May 09, 2017
Export Citation:
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Assignee:
Oxford Instruments Nanotechnology Tools Limited
International Classes:
G01N23/2252; G01N23/2257; H01J37/22; H01J37/244; H01J37/252; H01J37/28
Domestic Patent References:
JP6123709A
JP10038815A
JP2000260376A
JP2012122773A
JP2004191297A
JP2005283535A
JP2001156132A
JP2000123771A
Foreign References:
US20070052963
Attorney, Agent or Firm:
Shinichiro Tanaka
Teshimaru Ken
Yoshi Kazuhiko Ta
Matsushita Mitsuru
Ichiro Kurasawa
Yasushi Yamamoto