Title:
変位測定装置
Document Type and Number:
Japanese Patent JP7219060
Kind Code:
B2
Abstract:
To enable an angle of a scanning mirror to be detected accurately while reducing the size and cost of a displacement measuring device.SOLUTION: An emission angle of measurement light from a scanning mirror is detected based on the received light amount distribution output from a first light receiving unit that receives light at an end part of the measurement light scanned by the scanning mirror. A second light receiving unit sequentially receives measurement lights which are scanned by the scanning mirror and reflected from different positions of an object to be measured. The displacement of the object to be measured is measured based on the received light amount distribution output from the second light receiving unit and the information on the emission angle of the measurement light from the scanning mirror when the received light amount distribution is obtained.SELECTED DRAWING: Figure 5
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Inventors:
Masakazu Nishiki
Application Number:
JP2018211041A
Publication Date:
February 07, 2023
Filing Date:
November 09, 2018
Export Citation:
Assignee:
Keyence Corporation
International Classes:
G01B11/00
Domestic Patent References:
| JP2002090681A | ||||
| JP2014159989A |
Attorney, Agent or Firm:
Patent Attorney Corporation Maeda Patent Office